The plasma deposition system of nanostructures consists of a vacuum chamber, gas supply system and gas cylinders, vacuum pump, microwave generator, waveguide sections for microwaves, quadrupole mass spectrometer. Modules of the high voltage discharge gas treatment system consist of a vacuum gas treatment chamber, a module for supplying and controlling the flow of gas mixtures, signal and high voltage sources, modules for electrical diagnostics of high discharge discharges voltages. The sustem includes also a spectrometer for absorption spectrometry in the near and middle infrared region, allowing molecular analysis of gases at atmospheric and near atmospheric pressures, translucent solid samples and surfaces of opaque solid samples.